Head suspension having actuator in which piezoelectric element is bonded with bonding tape, actuator and method of attaching piezoelectric element with bonding tape

ABSTRACT

A head suspension includes a base to be attached to a carriage, a load beam having a rigid part and a resilient part that connects the rigid part to the base, the load beam applying load onto a read/write head, a flexure attached to the load beam and supporting the head, an actuator attaching part located between the base and the head, and a piezoelectric element being deformable in response to a voltage applied thereto to move the head in a sway direction relative to the base. For the head suspension, it bonds the piezoelectric element with a bonding tape to the actuator attaching part and applies an adhesive to fix the piezoelectric element to the actuator attaching part.

REFERENCE TO RELATED APPLICATION

This is a divisional application of Ser. No. 14/047,658, filed Oct. 7,2013 which is currently allowed. The subject matter of theaforementioned prior applications is hereby incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a head suspension having apiezoelectric element that deforms in response to an applied voltage, anactuator having such a piezoelectric element, and a method of attachingsuch a piezoelectric element to an actuator attaching part.

2. Description of Related Art

A head suspension is a device installed in, for example, a hard diskdrive to write and read data on a hard disk of the hard disk drive. Sucha head suspension may have an actuator in which a piezoelectric elementis attached to an actuator attaching part.

A head suspension, an actuator, and a method of attaching apiezoelectric element to an actuator attaching part according to arelated art will be explained with reference to FIGS. 15A to 15F.

FIGS. 15A to 15F are sectional views, in which FIG. 15A illustrates anactuator attaching part 103 and a contact 111 a of a flexure 111, FIG.15B illustrates a condition that a first adhesive AD1 is applied to theactuator attaching part 103, FIG. 15C illustrates a condition that apiezoelectric element 113 is bonded to the actuator attaching part 103,FIG. 15D illustrates a condition that the first adhesive AD1 issolidified; FIG. 15E illustrates a condition that a second adhesive AD2is filled between the piezoelectric element 113 and the actuatorattaching part 103; and FIG. 15F illustrates a condition that thepiezoelectric element 103 is fixed to the actuator attaching part 103with the adhesives AD1 and AD2.

The piezoelectric element 113 is attached to the head suspension asillustrated in FIGS. 15A to 15F.

In FIG. 15A, the actuator plate 101 of the head suspension or theactuator has the actuator attaching part 103. The actuator attachingpart 103 has an opening 105 and actuator supports 107 and 109 eachhaving a recessed shape. In the opening 105, there is positioned thecontact 111 a of the flexure 111. Onto the contact 111 a, conductivepaste EP is applied.

In FIG. 15B, the first adhesive AD1 is applied to the actuator supports107 and 109.

In FIG. 15C, the piezoelectric element 113 is set on the first adhesiveAD1 so that the piezoelectric element 113 is bonded to the actuatorsupports 107 and 109 through the first adhesive AD1. At this time, anelectrode surface of the piezoelectric element 113 is electricallyconnected through the conductive paste EP to the contact 111 a of theflexure 111.

In FIG. 15D, the first adhesive AD1 solidifies.

In FIG. 15E, the second adhesive AD2 is filled between the actuatorsupports 107 and 109 and the piezoelectric element 113.

In FIG. 15F, the second adhesive AD2 solidifies and unites with thefirst adhesive AD1, thereby fixing the piezoelectric element 113 to theactuator attaching part 103.

The related art uses the first adhesive AD1 to correctly position thepiezoelectric element 113 in the actuator attaching part 103 and thefirst and second adhesives AD1 and AD2 to surely fix the piezoelectricelement 113 to the actuator attaching part 103.

In this way, the related art involves a plurality of steps to apply andharden the adhesives. Namely, the related art must apply the firstadhesive AD1, harden the first adhesive AD1 after placing thepiezoelectric element 113 thereon, fill the second adhesive AD2 betweenthe actuator supports 107 and 109 and the piezoelectric element 113, andharden the second adhesive AD2. These adhesive applying and hardeningsteps are time-consuming to deteriorate productivity.

Further, the adhesives freely flow in the actuator attaching part 103and frequently ooze due to the capillary action into unintended gapsbetween the piezoelectric element 113 and any one or more of actuatorplate 101, flexure 111, and other parts of the head suspension. If thishappens, the rigidity, spring load, and dynamic characteristics of thehead suspension will be spoiled or varied.

This and other related arts are Japanese Unexamined Patent ApplicationPublications No. 2002-050140, No. 2002-184140, and No. 2010-79944.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a head suspension, anactuator, and a method of attaching a piezoelectric element to anactuator attaching part, capable of reducing the number of adhesiveapplying and hardening steps, correctly positioning the piezoelectricelement, and preventing an adhesive from freely flowing.

In order to accomplish the object, a first aspect of the presentinvention provides a head suspension including a base to be attached toa carriage and turned around a spindle of the carriage, a load beamhaving a rigid part and a resilient part, the resilient part connectingthe rigid part to the base, the load beam applying load onto a head at afront end distal to the base to write and read information, a flexureattached to the load beam, supporting the head, and including read/writewiring connected to the head, an actuator attaching part located betweenthe base and the head, to enable the head to be moved in a swaydirection relative to the base, a piezoelectric element fixed to theactuator attaching part and being deformable in response to a voltageapplied thereto to move the head in the sway direction relative to thebase, a bonding tape bonding the piezoelectric element to the actuatorattaching part, an adhesive fixing the bonded piezoelectric element tothe actuator attaching part.

A second aspect of the present invention provides a method of attachinga piezoelectric element to a head suspension that includes a base to beattached to a carriage and turned around a spindle of the carriage, aload beam having a rigid part and a resilient part, the resilient partconnecting the rigid part to the base, the load beam applying load ontoa head at a front end distal to the base to write and read information,a flexure attached to the load beam, supporting the head, and includingread/write wiring connected to the head, an actuator attaching partlocated between the base and the head, to enable the head to be moved ina sway direction relative to the base, and a piezoelectric element fixedto the actuator attaching part and being deformable in response to avoltage applied thereto to move the head in the sway direction relativeto the base. The method includes bonding the piezoelectric element witha bonding tape to the actuator attaching part and then applying anadhesive to fix the piezoelectric element to the actuator attachingpart.

A third aspect of the present invention provides an actuator includingan actuator attaching part located between a base and a movable part andmovably supporting the movable part relative to the base, apiezoelectric element fixed to the actuator attaching part and beingdeformable in response to a voltage applied thereto to move the movablepart relative to the base, a bonding tape bonding the piezoelectricelement to the actuator attaching part, and an adhesive fixing thebonded piezoelectric element to the actuator attaching part.

A fourth aspect of the present invention provides a method of attachinga piezoelectric element to an actuator that has an actuator attachingpart located between a base and a movable part and movably supportingthe movable part relative to the base, and a piezoelectric element fixedto the actuator attaching part and being deformable in response to avoltage applied thereto to move the movable part relative to the base.The method includes bonding the piezoelectric element with a bondingtape to the actuator attaching part and then applying an adhesive to fixthe piezoelectric element to the actuator attaching part.

According to the first aspect, the bonding tape bonds the piezoelectricelement to the actuator attaching part and the adhesive fixes the bondedpiezoelectric element to the actuator attaching part, to reduce thenumber of adhesive applying and hardening steps to one and surelyposition the piezoelectric element in the actuator attaching part by thebonding. In addition, the first aspect prevents the adhesive frompenetrating into unintended gaps. Surely fixing the piezoelectricelement to the actuator attaching part results in stabilizing therigidity, spring load, and dynamic characteristics of the headsuspension to precisely support the head.

According to the second aspect, the method uses the bonding tape to bondthe piezoelectric element to the actuator attaching part of the headsuspension and then applies the adhesive to fix the bonded piezoelectricelement to the actuator attaching part. The method reduces the number ofadhesive applying and hardening steps to one and surely positions thepiezoelectric element in the actuator attaching part by the bonding,thereby improving productivity. The bonding tape restricts the flowingof the adhesive that is applied after bonding with the bonding tape,thereby preventing the adhesive from penetrating into unintended gaps.This results in stabilizing the rigidity, spring load, and dynamiccharacteristics of the head suspension. The bonding tape is easy to behandled for bonding the piezoelectric element to the actuator attachingpart and using the bonding tape is achievable to improve productivity.

According to the third aspect, the bonding tape bonds the piezoelectricelement to the actuator attaching part and the adhesive fixes the bondedpiezoelectric element to the actuator attaching part, to reduce thenumber of adhesive applying and hardening steps to one and surelyposition the piezoelectric element in the actuator attaching part by thebonding. In addition, the third aspect prevents the adhesive frompenetrating into unintended gaps. With the correctly fixed piezoelectricelement, the actuator is capable of precisely driving, for example, ahead of a head suspension.

According to the fourth aspect, the method uses the bonding tape to bondthe piezoelectric element to the actuator attaching part of the actuatorand then applies the adhesive to fix the bonded piezoelectric element tothe actuator attaching part. The method reduces the number of adhesiveapplying and hardening steps to one and surely positions thepiezoelectric element in the actuator attaching part by the bonding,thereby improving productivity. The bonding tape restricts the flowingof the adhesive that is applied after bonding with the bonding tape,thereby stabilizing the rigidity and other characteristics of theactuator. The bonding tape is easy to be handled for bonding thepiezoelectric element to the actuator attaching part and using thebonding tape is achievable to improve productivity.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view illustrating a head suspension including anactuator, according to a first embodiment of the present invention;

FIG. 2 is a bottom plan view schematically illustrating the headsuspension of FIG. 1 with see-through portions of a flexure and thelike;

FIG. 3 is a sectional view taken along a line III-III of FIG. 2;

FIG. 4 is a perspective view illustrating the piezoelectric element ofFIG. 3;

FIGS. 5A and 5B schematically illustrate the piezoelectric element thatis provided with a bonding tape, in which FIG. 5A is a sectional viewtaken along a line VA-VA of FIG. 5B and FIG. 5B is a back view of thepiezoelectric element seen from the bonding tape side;

FIGS. 6A to 6D are sectional views illustrating a method of attachingthe piezoelectric element to the actuator attaching part, according tothe first embodiment of the present invention, in which FIG. 6Aillustrates the actuator attaching part and a contact of the flexure ofthe head suspension, FIG. 6B illustrates a condition that thepiezoelectric element is bonded to the actuator attaching part with thebonding tape, FIG. 6C illustrates a condition that an adhesive is filledbetween the piezoelectric element and the actuator attaching part, andFIG. 6D illustrates a condition that the piezoelectric element is fixedto the actuator attaching part with the adhesive;

FIGS. 7A to 7D illustrate a process of individually attaching apiezoelectric element to an actuator attaching part according to thefirst embodiment, in which FIG. 7A illustrates a first step thatarranges a piezoelectric element in opposition to a bonding tape set ona tape sheet, FIG. 7B illustrates a second step that bonds thepiezoelectric element to the bonding tape, FIG. 7C illustrates a thirdstep that lifts the piezoelectric tape with the bonding tape away fromthe tape sheet, and FIG. 7D illustrates a fourth step that bonds thepiezoelectric element to the actuator attaching part with the bondingtape;

FIGS. 8 and 9 illustrate a process of collectively attachingpiezoelectric elements to actuator attaching parts according to thefirst embodiment, in which FIG. 8 is a plan view illustrating thepiezoelectric elements bonded to bonding tapes of a tape sheet and FIG.9 is a plan view illustrating chained head suspensions having theactuator attaching parts to which the piezoelectric elements aligned ina line are collectively attached;

FIGS. 10A to 10C illustrate a second embodiment of the presentinvention, in which FIG. 10A is a back view of a piezoelectric elementwith a bonding tape, FIG. 10B is a sectional view illustrating acondition that the piezoelectric element is bonded to an actuatorattaching part with the bonding tape, a contact of a flexure is bondedto the piezoelectric element, and an adhesive is filled between thepiezoelectric element and the actuator attaching part, and FIG. 10C is asectional view illustrating a condition that the piezoelectric elementis fixed to the actuator attaching part with the adhesive;

FIGS. 11A to 11C illustrate a modification of the second embodiment, inwhich FIG. 11A is a back view of a piezoelectric element with a bondingtape, FIG. 11B is a sectional view illustrating a condition that thepiezoelectric element is bonded to an actuator attaching part with thebonding tape, a contact of a flexure is bonded to the piezoelectricelement, and an adhesive is filled between the piezoelectric element andthe actuator attaching part, and FIG. 11C is a sectional viewillustrating a condition that the piezoelectric element is fixed to theactuator attaching part with the adhesive;

FIGS. 12A to 12C illustrate a third embodiment of the present invention,in which FIG. 12A is a back view of a piezoelectric element with abonding tape, FIG. 12B is a sectional view illustrating a condition thatthe piezoelectric element is bonded to an actuator attaching part withthe bonding tape, a contact of a flexure is bonded to the piezoelectricelement, and an adhesive is filled between the piezoelectric element andthe actuator attaching part, and FIG. 12C is a sectional viewillustrating a condition that the piezoelectric element is fixed to theactuator attaching part with the adhesive;

FIGS. 13A and 13B are sectional views illustrating a fourth embodimentof the present invention, in which FIG. 13A illustrates a condition thata piezoelectric element is bonded to an actuator attaching part with abonding tape and inverted and a contact of a flexure is faced to thepiezoelectric element and FIG. 13B illustrates a condition that thecontact of the flexure is bonded to the piezoelectric element;

FIGS. 14A to 14D are sectional views illustrating a fifth embodiment ofthe present invention, in which FIG. 14A illustrates an actuatorattaching part and a contact of a flexure, FIG. 14B illustrates acondition that a piezoelectric element is bonded to the actuatorattaching part with a bonding tape, FIG. 14C illustrates a conditionthat an adhesive is filled between the piezoelectric element and theactuator attaching part, and FIG. 14D illustrates a condition that thepiezoelectric element is fixed to the actuator attaching part with theadhesive; and

FIGS. 15A to 15F are sectional views illustrating a related art, inwhich FIG. 15A illustrates an actuator attaching part and a contact of aflexure, FIG. 15B illustrates a condition that a first adhesive isapplied to the actuator attaching part, FIG. 15C illustrates a conditionthat a piezoelectric element is bonded to the actuator attaching part,FIG. 15D illustrates a condition that the first adhesive is solidified;FIG. 15E illustrates a condition that a second adhesive is filledbetween the piezoelectric element and the actuator attaching part; andFIG. 15F illustrates a condition that the piezoelectric element is fixedto the actuator attaching part with the adhesives.

DETAILED DESCRIPTION OF EMBODIMENTS

The present invention reduces the number of adhesive applying andhardening steps to one, surely positions a piezoelectric element in anactuator attaching part of a head suspension or an actuator, andprevents an adhesive from freely flowing. For this, the presentinvention provides a head suspension (1) including a base (10) to beattached to a carriage and turned around a spindle of the carriage, aload beam (5) having a rigid part (21) and a resilient part (23 a, 23b), the resilient part connecting the rigid part (21) to the base (10),the load beam (5) applying load onto a head (26) at a front end distalto the base (10) to write and read information, a flexure (7) attachedto the load beam (5) and supporting the head (26), and includingread/write wiring (28) connected to the head (26), an actuator attachingpart (17) arranged between the base (10) and the head (26), to enablethe head (26) to be moved in a sway direction relative to the base (10),and a piezoelectric element (15) fixed to the actuator attaching part(17), the piezoelectric element (15) being deformable in response to avoltage applied thereto to move the head (26) in the sway directionrelative to the base (10). Based on the head suspension (1), the presentinvention bonds the piezoelectric element (15) with a bonding tape (27)to the actuator attaching part (17) and then applies a nonconductiveadhesive (29) to fix the piezoelectric element (15) to the actuatorattaching part (17).

Now, the present invention will be explained in detail with reference tothe embodiments and accompanying drawings.

First, a head suspension, an actuator, and a method of attaching apiezoelectric element according to a first embodiment of the presentinvention will be explained. FIG. 1 is a perspective view illustratingthe head suspension 1 according to the first embodiment and FIG. 2 is abottom plan view schematically illustrating the head suspension 1 ofFIG. 1 with see-through portions of the flexure 7 and the like. In thisspecification, a direction in a rotation radius of the head suspensionis referred to as “length direction” or “front-rear direction”, adirection orthogonal to the length direction as “width direction” or“sway direction”, and an axial direction around which the headsuspension is turned as “thickness direction”.

As illustrated in FIGS. 1 and 2, the head suspension 1 has a base plate3, a load beam 5, and a flexure 7. Also, the head suspension 1 includesthe actuator 9.

The base plate 3 is a component of a base 10 that is fitted to acarriage (not illustrated) that drives and turns the base 10, i.e., thehead suspension 1 around a spindle. The base plate 3 has a boss 11allows the base plate 3 to be fixed to the carriage by ball-caulking.The base plate 3 is integrally attached to the actuator 9.

The actuator 9 includes an actuator plate 13 and a piezoelectric element15 attached to the actuator plate 13. The actuator plate 13 includes areinforcing part 16 and an actuator attaching part 17. The reinforcingpart 16 is laid on the base plate 3 and is fixed thereto by, forexample, laser spot welding, thereby forming the base 10. The actuatorattaching part 17 has a front end 17 a to which the load beam 5 isintegrally fixed by, for example, laser spot welding.

The load beam 5 includes a rigid part 21 and a resilient part 23comprising separated resilient parts 23 a and 23 b that connect a baseend of the rigid part 21 to the base 10. The load beam 5 applies loadonto a head 26 that is a movable part at a front end distal to the base10 to write and read information. The resilient parts 23 a and 23 b arejoined to the front end 17 a of the actuator attaching part 17 of theactuator plate 13. To the rigid part 21 of the load beam 5, the flexure7 is attached.

A front end of the flexure 7 has a slider 25 including read/writeelements (not illustrated) to form the head 26. The read/write elementsare connected to read/write wiring 28 of the flexure 7. The flexure 7extends through the actuator attaching part 17 toward the base plate 3.

The actuator attaching part 17 is located between the base 10 and thehead 26, to move the head 26 with the load beam 5 in the sway directionwith respect to the base 10.

FIG. 3 is a sectional view taken along a line III-III of FIG. 2 and FIG.4 is a perspective view illustrating the piezoelectric element 15.

As illustrated in FIGS. 3 and 4, the piezoelectric element 15 is fixedto the actuator attaching part 17 and deforms in response to a voltageapplied thereto, to move the head 26 in the sway direction relative tothe base 10. The piezoelectric element 15 is bonded to the actuatorattaching part 17 with a bonding tape 27 and is fixed to the same with anonconductive adhesive 29. This will be explained in more detail.

As illustrated in FIGS. 1 to 3, the actuator attaching part 17 has athrough opening 20 formed through the actuator attaching part 17 at acentral portion in the front-rear direction and actuator supports 31 and33 formed on both sides of the through opening 20 in the front-reardirection, respectively. On respective widthwise sides of the actuatorattaching part 17, left and right flexible parts 34 a and 34 b eachhaving a U-shape are integrally formed and protrude outward. Theactuator supports 31 and 33 continuously extends in the width directionfrom a base part of the flexible part 34 a to a base part of theflexible part 34 b along respective front and rear sides of the actuatorattaching part 17. The actuator supports 31 and 33 include opposingfaces 31 a and 33 a as upright faces extending along the thicknessdirection in the cross section of FIG. 3 and support faces 31 b and 33 bintersecting the thickness direction. The support faces 31 b and 33 bare orthogonal to the opposing faces 31 a and 33 a, so that each of theactuator supports 31 and 33 has a recessed shape.

The actuator supports 31 and 33 may be formed only at the bases of theflexible parts 34 a and 34 b, or only along the front and rear sides ofthe actuator attaching part 17, or only at four corners defined by thebases of the flexible parts 34 a and 34 b and the front and rear sidesof the actuator attaching part 17. The opposing faces 31 a and 33 a andsupport faces 31 b and 33 b may be formed by joining separate platematerials together.

Front and rear edges of a common electrode plate 35 of the piezoelectricelement 15 are bonded to the respective support faces 33 b and 31 b withthe bonding tape 27. Front and rear end faces 15 a and 15 b of thepiezoelectric element are fixed to the opposing faces 31 a and 33 a,respectively, with the nonconductive adhesive 29. End faces 15 c and 15d of the piezoelectric element 15 are partly fixed to the opposing faces31 a and 33 a in the width direction in the vicinities of the flexibleparts 34 a and 34 b with the nonconductive adhesive 29.

According to the first embodiment, the bonding tape 27 is non-liquid anddoes not harden after the nonconductive adhesive 29 hardens. The bondingtape 27 may be one that hardens when the nonconductive adhesive 29hardens.

The contact 7 a of the flexure 7 (hereinafter also referred to as“flexure contact 7 a”) is bonded to a central part of the commonelectrode plate 35 of a first surface of the piezoelectric element 15with conductive paste 37 such as silver paste that is a conductiveadhesive. On a second surface opposite to the common electrode plate 35,the piezoelectric element 15 has a pair of electrode plates 39 a and 39b that are connected to the front end 17 a of the actuator attachingpart 17 with respective conductive adhesives 41 a and 41 b asillustrated in FIG. 1.

As illustrated in FIG. 4, the piezoelectric element 15 is a flat platehaving a rectangular shape and is made of a pair of piezoelectricmaterials 43 a and 43 b. On and over first surfaces of the piezoelectricmaterials 43 a and 43 b, the common electrode plate 35 is provided, andon second surfaces thereof, the pair of respective electrode plates 39 aand 39 b are provided.

When a voltage is applied to, for example, the common electrode plate35, the piezoelectric material 43 a contracts and the piezoelectricmaterial 43 b expands, so that the piezoelectric element 15 displaces ina Z-direction by a very small distance. This results in moving the head26 in the Z-direction relative to the base 10.

When the common electrode plate 35 is grounded and a voltage is appliedto the pair of electrode plates 39 a and 39 b, the piezoelectric element15 displaces in a −Z-direction (opposite to the Z-direction) by a verysmall distance, to move the head 26 in the −Z-direction relative to thebase 10.

The head suspension 1 is attached to a carriage (not illustrated)through the boss 11 and is installed in a hard disk drive. The carriageis driven by a voice coil motor in the hard disk drive, to turn the headsuspension 1 so that the head 26 is moved on a hard disk of the harddisk drive to write and read information on the hard disk.

A method of attaching the piezoelectric element 15 to the actuatorattaching part 17 of the head suspension 1 (the actuator 9) according tothe first embodiment will be explained.

FIGS. 5A and 5B illustrate the piezoelectric element 15 with the bondingtape 27, in which FIG. 5A is a sectional view taken along a line VA-VAof FIG. 5B and FIG. 5B is a back view of the piezoelectric element 15seen from the bonding tape side. FIGS. 6A to 6D are sectional viewsillustrating the piezoelectric element attaching method according to thefirst embodiment, in which FIG. 6A illustrates the actuator attachingpart 17 and the contact 7 a of the flexure 7. FIG. 6B illustrates acondition that the piezoelectric element 15 is bonded to the actuatorattaching part 17 with the bonding tape 27, FIG. 6C illustrates acondition that the adhesive 29 is filled between the piezoelectricelement 15 and the actuator attaching part 17, and FIG. 6D illustrates acondition that the piezoelectric element 15 is fixed to the actuatorattaching part 17 with the adhesive 29.

In FIGS. 5A and 5B, the bonding tape 27 having a rectangular frame shapeis bonded in advance along a peripheral edge of the common electrodeplate 35 of the piezoelectric element 15 that is the rectangular flatplate.

In FIG. 6A, the contact 7 a of the flexure 7 on which the conductivepaste 37 is applied is set in the through opening 20 of the actuatorattaching part 17 so that the contact 7 a of the flexure 7 faces a spacefor accommodating the piezoelectric element 15 in the actuator attachingpart 17.

In FIG. 6B, the piezoelectric element 15 with the bonding tape 27 bondedto the common electrode plate 35 is arranged in the actuator attachingpart 17. The widthwise side edges of the piezoelectric element 15 arepartly bonded to the support faces 31 b and 33 b with the bonding tape27 around the flexible parts 34 a and 34 b. The front and rear edges ofthe piezoelectric element 15 are entirely bonded to the front and rearsupport faces 31 b and 33 b with the bonding tape 27. At this time, thecontact 7 a of the flexure 7 is bonded to a central portion of thecommon electrode plate 35 with the conductive paste 37.

The bonding tape 27 may be attached in advance to the support faces 31 band 33 b, and thereafter, the piezoelectric element 15 may be bonded tothe bonding tape 27 on the support faces 31 b and 33 b.

In FIG. 6C, the nonconductive liquid adhesive 29 is filled between theend faces 15 c and 15 d of the piezoelectric element 15 and the opposingfaces 31 a and 33 a of the actuator attaching part 17. Although notillustrated, the nonconductive adhesive 29 is also filled between theend faces 15 a and 15 b of the piezoelectric element 15 and the opposingfaces 31 a and 33 a of the actuator attaching part 17 like FIG. 6C.

Although the nonconductive adhesive 29 has fluidity, the bonding tape 27bonded to the piezoelectric element 15 and the support faces 31 b and 33b stops the flowing of the nonconductive adhesive 29 or prevents thepassage or oozing of the nonconductive adhesive 29 caused by thecapillary action. As a result, the nonconductive adhesive 29 does notreach the flexure 7 or other parts.

As the nonconductive adhesive 29 is prevented from penetrating orflowing into unintended gaps between the piezoelectric element 15 andany one or more of the actuator plate 13, load beam 5, and flexure 7during the application and solidification of the adhesive 29, the headsuspension 1 is stable and uniform in rigidity, spring load, and dynamiccharacteristics.

The nonconductive adhesive 29 can be applied as soon as thepiezoelectric element 15 is bonded to the actuator attaching part 17with the bonding tape 27 as illustrated in FIGS. 6B and 6C. Namely,there is no need for setting a wait time that must be set if an adhesive(such as AD1 of FIG. 15B of the related art) is used instead of thebonding tape 27. Accordingly, the first embodiment can reduce the numberof time-consuming adhesive applying and solidifying processes to one, toimprove productivity.

In FIG. 6D, the nonconductive adhesive 29 solidifies to fix part of theend faces 15 c and 15 d and the whole of the end faces 15 a and 15 b(FIG. 2) of the piezoelectric element 15 to the opposing faces 31 a and33 a of the actuator attaching part 17.

The bonding of the piezoelectric element 15 to the actuator attachingpart 17 with the bonding tape 27 is carried out individually asillustrated in FIGS. 7A to 7D or collectively as illustrated in FIGS. 8and 9.

FIGS. 7A to 7D illustrate the process of individually attaching thepiezoelectric element 15 to the actuator attaching part 17

In the bonding process of FIGS. 7A to 7D, the first step of FIG. 7Aarranges the piezoelectric element 15 on the bonding tape 27 set on thetape sheet 45 one-on-one. The second step of FIG. 7B lowers thepiezoelectric element 15 to bond the piezoelectric element 15 onto thecorresponding bonding tape 27. The third step of FIG. 7C lifts thepiezoelectric element 15 together with the bonding tape 27 bonded to thelifting piezoelectric element 15 away from the tape sheet 45. The fourthstep of FIG. 7D bonds the piezoelectric element 15 to the support faces31 b and 33 b with the bonding tape 27. FIG. 7D corresponds to FIG. 6B.

FIGS. 8 and 9 illustrate a process of collectively attachingpiezoelectric elements 15 to actuator attaching parts 17. In FIG. 8,piezoelectric elements 15 are bonded to each set of linearly-alignedbonding tapes 27 on a tape sheet 45A, respectively. Although the bondingtape 27 is under the piezoelectric element 15 and is actually invisiblein FIG. 8, the bonding tape 27 is illustrated in FIG. 8 (the number “27”in parentheses) together with the piezoelectric element 15 for easyunderstanding. In FIG. 9, the bonding tapes 27 in the single line arecollectively bonded to the actuator attaching parts of chained headsuspension 1A. In other words, the piezoelectric elements 15 on thebonding tapes 27 in the single line on the tape sheet 45 arecollectively bonded to the actuator attaching parts of chained headsuspensions 1A with the bonding tapes 27, respectively. It is possibleto individually attach the piezoelectric elements 15 on the tape sheet45A to the actuator attaching parts of the chained head suspensions 1A.

Effects of the first embodiment of the present invention will beexplained.

The head suspension 1 according to the first embodiment includes thebase 10 to be attached to a carriage and turned around a spindle of thecarriage, the load beam 5 having the rigid part 21 and resilient part(23 a, 23 b), the resilient part connecting the rigid part 21 to thebase 10, the load beam 5 applying load onto the head 26 at a front enddistal to the base 10 to write and read information, the flexure 7attached to the load beam 5, supporting the head 26, and includingread/write wiring connected to the head 26, the actuator attaching part17 arranged between the base 10 and the head 26, to enable the head 26to be moved in a sway direction relative to the base 10, and thepiezoelectric element 15 fixed to the actuator attaching part 17, thepiezoelectric element 15 being deformable in response to a voltageapplied thereto to move the head 26 in the sway direction relative tothe base 10. The piezoelectric element 15 is bonded to the actuatorattaching part 17 with the bonding tape 27 and is fixed to the same withthe nonconductive adhesive 29.

This configuration reduces the number of time-consuming adhesiveapplying and hardening steps to one and surely positions thepiezoelectric element 15 in the actuator attaching part 17, to therebyimprove productivity.

The bonding tape 27 restricts the flowing of the nonconductive adhesive29 before it hardens, thereby preventing the adhesive 29 from oozinginto unintended gaps between the piezoelectric element 15 and theactuator plate 13, load beam 5, and flexure 7 due to the capillaryaction.

Accordingly, the piezoelectric element 15 is correctly bonded and fixedto the actuator attaching part 17 of the head suspension 1. It,therefore, suppresses variation in rigidity, spring load, and dynamiccharacteristics of the head suspension 1. In other words, the headsuspension 1 is stable and uniform in rigidity, spring load, and dynamiccharacteristics, to correctly support and drive the head 26.

In particular, the actuator attaching part 17 has the through opening 20formed through the actuator attaching part 17 in the thickness directionand located between the base 10 and the head 26 in the front-reardirection. The actuator supports 31 and 33 each having a recessed shapeare formed on both sides of the through opening 20 in the front-reardirection respectively. The actuator supports 31 and 33 include theopposing faces 31 a and 33 a that extending along the thicknessdirection and support faces 31 b and 33 b intersecting or orthogonal tothe thickness direction. Edges of the common electrode plate 35 of thepiezoelectric element 15 are bonded to the respective support faces 31 band 33 b of the actuator attaching part 17 with the bonding tape 27. Thewhole of the end faces 15 a and 15 b and part of the end faces 15 c and15 d of the piezoelectric element 15 are fixed to the opposing faces 31a and 33 a of the actuator attaching part 17 with the nonconductiveadhesive 29.

The piezoelectric element 15 is bonded to the support faces 31 b and 33b with the bonding tape 27 and is fixed to the opposing faces 31 a and33 a with the nonconductive adhesive 29, thereby to result in correctlyattaching the piezoelectric element 15 to the recessed actuator supports31 and 33 and improve productivity.

The piezoelectric element attaching method for the head suspension 1according to the first embodiment bonds the piezoelectric element 15 tothe actuator attaching part 17 with the bonding tape 27 and then fixesthe piezoelectric element 15 and the actuator attaching part 17 togetherwith the nonconductive adhesive 29.

The method reduces the number of time-consuming adhesive applying andhardening steps to one, i.e., needs only the applying and hardening stepfor the nonconductive adhesive 29 and surely positions the piezoelectricelement 15 in the actuator attaching part 17 by bonding with the bondingtape 27, thereby improving productivity. The piezoelectric element 15 isbonded to the actuator attaching part 17 with the bonding tape 27 priorto fixing with the nonconductive adhesive 29, so that it restricts theflowing of the nonconductive adhesive 29 before it hardens. Thisprevents the adhesive 29 from oozing into unintended gaps due to thecapillary action. The head suspension 1 thus produced is stable anduniform in rigidity, spring load, and dynamic characteristics.

The method attaches the common electrode plate 35 of the piezoelectricelement 15 to the bonding tape 27 on the tape sheet 45, removes thepiezoelectric element 15 together with the bonding tape 27 from the tapesheet 45, and bonds the piezoelectric element 15 to the actuatorattaching part 17 with the bonding tape 27. This technique avoids thebonding tape 27 itself from being solely handled and easily bonds thepiezoelectric element 15 having the bonding tape 27 to the actuatorattaching part 17.

The actuator 9 according to the first embodiment includes the actuatorattaching part 17 located between the base 10 and the head 26 movablysupporting the head 26 relative to the base 10. The actuator 9 alsoincludes the piezoelectric element 15 attached to the actuator attachingpart 17, the piezoelectric element 15 being deformable in response to avoltage applied thereto to move the head 26 relative to the base 10. Thepiezoelectric element 15 is bonded to the actuator attaching part 17with the bonding tape 27 and is fixed to the same with the nonconductiveadhesive 29.

This configuration reduces the number of time-consuming adhesiveapplying and hardening steps to one and surely positions thepiezoelectric element 15 in the actuator attaching part 17. In addition,it prevents the adhesive 29 from penetrating into gaps around thepiezoelectric element 15 and correctly bonds and fixes the piezoelectricelement 15 to the actuator attaching part 17 of the actuator 9.

The piezoelectric element attaching method for the actuator 9 accordingto the first embodiment bonds the piezoelectric element 15 to theactuator attaching part 17 with the bonding tape 27 and then applies thenonconductive adhesive 29 to fix the piezoelectric element 15 to theactuator attaching part 17.

The method reduces the number of time-consuming adhesive applying andhardening steps to one and surely positions the piezoelectric element 15in the actuator attaching part 17 of the actuator 9 to improveproductivity. The piezoelectric element 15 is bonded to the actuatorattaching part 17 with the bonding tape 27 prior to fixing with thenonconductive adhesive 29, so that it restricts the flowing of thenonconductive adhesive 29. The actuator 9 thus produced is, therefore,stable and uniform in rigidity and other characteristics.

Head suspensions, actuators, and methods of attaching a piezoelectricelement according to the second to fifth embodiments of the presentinvention will be explained with reference to FIGS. 10A to 14D. Theseembodiments are based on the first embodiment, and therefore, FIGS. 10Ato 14D illustrate only characteristic parts of the embodiments (inparticular, the actuator attaching part and piezoelectric element of ahead suspension or of an actuator of each embodiment). For the otherparts of the second to fifth embodiments not illustrated in FIGS. 10A to14D, FIGS. 1 to 4 commonly serve.

The second embodiment will be explained with reference to FIGS. 10A to10C. The second embodiment is based on the first embodiment, andtherefore, like parts are represented with like reference numerals orlike reference numerals plus “B” to omit overlapping explanation.

FIG. 10A is a back view of the piezoelectric element 15 with a bondingtape 27B, FIG. 10B is a sectional view illustrating a condition that thepiezoelectric element 15 is bonded to the actuator attaching part 17with the bonding tape 27B, the flexure contact 7 a is bonded to thepiezoelectric element 15, and an adhesive 29 is filled between thepiezoelectric element 15 and the actuator attaching part 17, and FIG.10C is a sectional view illustrating a condition that the piezoelectricelement 15 is fixed to the actuator attaching part 17 with the adhesive29.

According to the second embodiment, the bonding tape 27B has a centralcontact hole 27Ba to define and expose a contact on the piezoelectricelement 15 and is bonded to the common electrode plate 35 of thepiezoelectric element 15.

Attaching the piezoelectric element 15 to the actuator attaching part 17is carried out in an order similar to FIGS. 6A to 6D. FIG. 10Bcorresponds to FIG. 6C and FIG. 10C to FIG. 6D. According to the secondembodiment, the contact 7 a of the flexure 7 is set in the throughopening 20 and is bonded through the hole 27Ba of the bonding tape 27Bto a central portion of the common electrode plate 35 of thepiezoelectric element 15 with the conductive paste 37.

As a result, the conductive paste 37 on the flexure contact 7 a issurrounded by an inner periphery of the hole 27Ba to prevent theconductive paste 37 from spreading or oozing out. If the bonding tape27B is one that does not harden after the nonconductive adhesive 29hardens, it will relax stress on the conductive paste 37 on the flexurecontact 7 a.

Otherwise, the second embodiment provides effects similar to those ofthe first embodiment.

A modification of the second embodiment will be explained with referenceto FIGS. 11A to 11C. The modification is based on the first and secondembodiments, and therefore, like parts are represented with likereference numerals or like reference numerals plus “C” to omitoverlapping explanation.

FIG. 11A is a back view of the piezoelectric element 15 with a bondingtape 27C, FIG. 11B is a sectional view illustrating a condition that thepiezoelectric element 15 is bonded to the actuator attaching part 17with the bonding tape 27C, the flexure contact 7 a is bonded to thepiezoelectric element 15, and the adhesive 29 is filled between thepiezoelectric element 15 and the actuator attaching part 17, and FIG.11C is a sectional view illustrating a condition that the piezoelectricelement 15 is fixed to the actuator attaching part 17 with the adhesive29.

According to the modification, the bonding tape 27C has a ring 27Ca(FIG. 11A) instead of the hole 27Ba (FIG. 10A) of the second embodiment.The bonding tape 27C is basically the same as the bonding tape 27 of thefirst embodiment except that the bonding tape 27C has the central ring27Ca.

The ring 27Ca is already formed in the bonding tape 27C when the bondingtape 27C is on the tape sheet 45 of FIG. 7A (45A of FIG. 8). When thepiezoelectric element 15 is bonded to the bonding tape 27C on the tapesheet, the ring 27Ca is also bonded to the piezoelectric element 15.

Attaching the piezoelectric element 15 to the actuator attaching part 17is carried out in an order similar to FIGS. 6A to 6D. FIG. 11Bcorresponds to FIG. 6C and FIG. 11C to FIG. 6D.

The modification surrounds the conductive paste 37 on the flexurecontact 7 a by the ring 27Ca to prevent the conductive paste 37 fromspreading or oozing out. In addition, the modification prevents thebonding tape 27C from being excessively exposed. If the bonding tape 27Cis one that does not harden after the nonconductive adhesive 29 hardens,it will relax stress on the conductive paste 37 on the flexure contact 7a.

The third embodiment will be explained with reference to FIGS. 12A to12C. The third embodiment is based on the first embodiment, andtherefore, like parts are represented with like reference numerals orlike reference numerals plus “D” to omit overlapping explanation.

FIG. 12A is a back view of the piezoelectric element 15 with a bondingtape 27D, FIG. 12B is a sectional view illustrating the piezoelectricelement 15 bonded to an actuator attaching part 17D with the bondingtape 27D, the flexure contact 7 a bonded to the piezoelectric element15, and the adhesive 29 filled between the piezoelectric element 13 andthe actuator attaching part 17D, and FIG. 12C is a sectional viewillustrating the piezoelectric element 15 fixed to the actuatorattaching part 17D with the adhesive 29.

According to the third embodiment, the bonding tape 27D has widthwiseside portions 27Da and 27Db that are wider than those of the firstembodiment. Support faces 31Db and 33Db of the actuator attaching part17D in an actuator plate 13D are accordingly wider than those of thefirst embodiment. The bonding tape 27D is viscoelastic and hasviscoelasticity even after the nonconductive adhesive 29 hardens.

Attaching the piezoelectric element 15 to the actuator attaching part17D is carried out in an order similar to FIGS. 6A to 6D. FIG. 12Bcorresponds to FIG. 6C and FIG. 12C to FIG. 6D.

According to the third embodiment, the bonding tape 27D having the widerside portions 27Da and 27Db than the first embodiment bonds thepiezoelectric element 15 to the wider support faces 31Db and 33Db, tosurely suppress vibration of the support faces 31Db and 33Db withouthindering a stroke of the piezoelectric element 15.

Any one of the first, second, and fourth (explained below) embodimentsmay employ a viscoelastic bonding tape. In the second embodiment ofFIGS. 10A to 10C, the bonding tape 27B may have viscoelasticity like thebonding tape 27D of FIG. 12A and the support faces 31 b and 33 b may bewidened. In the modification of FIGS. 11A to 11C, the bonding tape 27Cmay have viscoelasticity like the bonding tape 27D of FIG. 12A and theside portions of the bonding tape 27C and the support faces 31 b and 33b may be widened. With the viscoelastic bonding tapes, the examples ofFIGS. 10A to 10C and 11A to 11C are able to suppress vibrations of theflexures 7.

The fourth embodiment of the present invention will be explained withreference to FIGS. 13A and 13B. The fourth embodiment is based on thefirst embodiment, and therefore, like parts are represented with likereference numerals or like reference numerals plus “E” to omitoverlapping explanation.

FIG. 13A illustrates a condition that the piezoelectric element 15 isbonded to the actuator attaching part 17 with a bonding tape 27E andinverted and the flexure contact 7 a is faced to the piezoelectricelement 15 and FIG. 13B is a sectional view illustrating a conditionthat the flexure contact 7 a is bonded to the piezoelectric element 15.

According to the fourth embodiment, the piezoelectric element 15 isbonded to the support faces 31 b and 33 b of the actuator supports 31and 33 of the actuator attaching part 17 with the bonding tape 27E likeFIG. 6B. At this time, the contact 7 a of the flexure 7 is not yetbonded to the piezoelectric element 15 in this example. The actuatorattaching part 17 with the piezoelectric element 15 is inverted asillustrated in FIG. 13A.

The bonding tape 27E has a central contact hole 27Ea like that of FIG.10A.

Conductive paste 37 is applied to a central part of the common electrodeplate 35 of the piezoelectric element 15 and the contact 7 a of theflexure 7 is set on the conductive paste 37 and is bonded to the commonelectrode plate 35 with the conductive paste 37 as illustrated in FIG.13B. At this time, the conductive paste 37 on the flexure contact 7 a issurrounded by the inner periphery of the hole 27Ea, and therefore, doesnot ooze out.

In this way, the fourth embodiment bonds the piezoelectric element 15 tothe actuator attaching part 17 with the bonding tape 27E, and just afterthat, allows the actuator attaching part 17 and piezoelectric element 15to be inverted. Thereafter, the fourth embodiment electrically connectsthe flexure contact 7 a to the common electrode plate 35 of thepiezoelectric element 15 so that the flexure 7 is put on thepiezoelectric element 15.

The technique of the fourth embodiment is applicable to the second andthird embodiments of FIGS. 10A to 12C.

The fifth embodiment of the present invention will be explained withreference to FIGS. 14A to 14D. The fifth embodiment is based on thefirst embodiment, and therefore, like parts are represented with likereference numerals or like reference numerals plus “F” to omitoverlapping explanation.

FIG. 14A illustrates the actuator attaching part 17 and flexure contact7 a, FIG. 14B illustrates a condition that the piezoelectric element 15is bonded to the actuator attaching part 17 with a bonding tape 27F.FIG. 14C illustrates a condition that the adhesive 29 is filled betweenthe piezoelectric element 15 and the actuator attaching part 17, andFIG. 14D illustrates a condition that the piezoelectric element 15 isfixed to the actuator attaching part 17 with the adhesive 29.

According to the fifth embodiment, an actuator plate 13F that definesthe actuator attaching part 17 is made of a first plate 13Fa havingopposing faces 31 a and 33 a and a second plate 13Fb having supportfaces 31 b and 33 b. The first and second plates 13Fa and 13Fb are laidone on another and joined together.

The bonding tape 27F has an outline of an outer circumferential edgethat is larger than an outline of an outer circumferential edge of thepiezoelectric element 15 and is equal to an inner circumferential edgeof the actuator attaching part 17. As a result, the edge of the bondingtape 27F protrudes out of the edge of the piezoelectric element 15.

Attaching the piezoelectric element 15 to the actuator attaching part 17is carried out like FIGS. 6A to 6D. Namely, FIGS. 14A to 14D correspondto FIGS. 6A to 6D, respectively.

According to the fifth embodiment, the edge of the bonding tape 27Fcloses a joint line between the first and second plates 13Fa and 13Fb,to prevent the nonconductive adhesive 29 filled as illustrated in FIG.14C from penetrating into a gap between the first and second plates 13Faand 13Fb due to the capillary action.

To surely fit the edge of the bonding tape 27F to the support faces 31 band 33 b in FIG. 14B, air may be blown to the edge of the bonding tape27F protruding from the piezoelectric element 15. This surely closes thejoint line between the first and second plates 13Fa and 13Fb with thebonding tape 27F.

If there is no adhesive on an upper surface of the edge of the bondingtape 27F protruding from the piezoelectric element 15 in FIG. 14B, a jigmay be used to press the edge of the bonding tape 27F from the above inthe step of FIG. 14B so that the joint line between the first and secondplates 13Fa and 13Fb is surely closed with the bonding tape 27F.

The edge of the bonding tape 27F protruding from the piezoelectricelement 15 is satisfactory if it can close the joint line between thefirst and second plates 13Fa and 13Fb. It is possible to form theprotruding edge of the bonding tape 27F only on the front and rear sidesof the piezoelectric element 15 or only on the left and right sidesthereof.

The bonding tape 27F may be attached in advance to the support faces 31b and 33 b to close the joint line between the first and second plates13Fa and 13Fb, and thereafter, the piezoelectric element 15 may bebonded onto the bonding tape 27F on the support faces 31 b and 33 b.

The fifth embodiment is applicable to any one of the second to fourthembodiments of FIGS. 10A to 13B.

According to the embodiments mentioned above, the base plate 3 andactuator plate 13 are made from discrete plate materials. Instead, theymay integrally be made from a single plate material.

According to the embodiments, the actuator 9 includes only onepiezoelectric element 15. Instead, the actuator 9 may include a pair ofpiezoelectric elements arranged side by side.

The actuator 9 of the present invention is applicable not only to a headsuspension but also to other devices.

What is claimed is:
 1. A method of attaching a piezoelectric element toa head suspension that includes a base to be attached to a carriage andturned around a spindle of the carriage, a load beam having a rigid partand a resident part, the resilient part connecting the rigid part to thebase, the load beam applying load onto a head at a front end distal tothe base to write and read information, a flexure attached to the loadbeam and supporting the head to connect the head to read/write wiring,an actuator attaching part located between the base and the head, toenable the head to be moved in a sway direction relative to the base,and the piezoelectric element fixed to the actuator attaching part, thepiezoelectric element being deformable in response to a voltage appliedthereto to move the head in the sway direction relative to the base, themethod comprising: bonding the piezoelectric element with a bonding tapeto the actuator attaching part; and applying an adhesive to fix thepiezoelectric element to the actuator attaching part after the bondingstep.
 2. The method of claim 1, wherein the actuator attaching part hasa through opening formed through the actuator attaching part in athickness direction and actuator supports formed on both sides of theopening, respectively, each of the actuator supports having a recessedshape defined with an upright face extending in the thickness directionand a support face intersecting, the thickness direction, wherein thebonding step bonds, with the bonding tape, edges of an electrode surfaceof the piezoelectric element to the respective support faces of theactuator supports, and wherein the applying step fixes, with theadhesive, end faces of the piezoelectric element to the upright faces ofthe actuator supports.
 3. The method of claim 2, further comprising:attaching the bonding tape having a center contact hole to the electrodesurface of the piezoelectric element; and bonding, with a conductiveadhesive, a contact of the flexure positioned in the through opening tothe electrode surface of the piezoelectric element through the contacthole.
 4. The method of claim 2, further comprising: attaching thebonding tape having a center ring to the electrode surface of thepiezoelectric element; and bonding, with a conductive adhesive, acontact of the flexure positioned in the through opening to theelectrode surface of the piezoelectric element through the ring.
 5. Themethod of claim 2, further comprising: attaching the bonding tape to thepiezoelectric element so that an edge of the bonding tape protrudes froman edge of the piezoelectric element, and closing a joint line betweenfirst and second plates with the edge of the bonding tape, the first andsecond plates being discrete and joined together to form the respectiveupright face and support face of each actuator support.
 6. The method ofclaim 2, further comprising: inverting the piezoelectric element withthe actuator supports after the bonding step; and bonding, with aconductive adhesive, a contact of the flexure to the piezoelectricelement.
 7. The method of claim 2, further comprising: attaching theelectrode surface of the piezoelectric element to a bonding tape set ona tape sheet; and removing the piezoelectric element together with thebonding tape attached to the piezoelectric element from the tape sheet,to conduct the bonding step.
 8. A method of attaching a piezoelectricelement to an actuator that includes an actuator attaching part locatedbetween a base and a movable part and movably supporting the movablepart relative to the base, and the piezoelectric element attached to theactuator attaching part, the piezoelectric element being deformable inresponse to a voltage applied thereto to move the movable part relativeto the base, the method comprising: bonding the piezoelectric elementwith a bonding tape to the actuator attaching part; and applying anadhesive to fix the piezoelectric element to the actuator attachingpart.